Which Sensor Is Suitable for Detecting Proper Workpiece Seating?

ID: FAQE40058E

update:

Answer

We offer a range of sensors capable of detecting proper workpiece seating. Please refer to the features and application examples of each product to support your issue resolution and product selection.

① Light Convergent Reflective Sensor (B5W-LB)
②Photomicrosensors (EE-SX Series)

Explanation

① Light Convergent Reflective Sensor (B5W-LB)

This sensor is less affected by color or material, and can detect mirror surfaces, black objects, and transparent objects. By focusing LED light with a lens, the sensor achieves a smaller spot size.

Application Example

■Application: Semiconductor Inspection Equipment

This sensor detects the seating status of FOUP*1.
Due to the small spot diameter, if the FOUP*1 is not properly seated in the designated position, the reflected light returning to the sensor decreases, resulting in a light-blocked state. This enables detection of misalignment or improper seating of the FOUP*1.

(*1 FOUP: Front Opening Unified Pod, a container used for transporting semiconductor wafers.)

②Photomicrosensors (EE-SX Series)

This sensor detects the presence or absence of an object in the slot between the emitter and receiver. A wide product lineup is available to suit various application requirements.

Application Example

■Application: Semiconductor Inspection Equipment

This sensor can detect whether a wafer cassette is properly attached.


Product category Sensors Photomicro Sensors Light Convergent Reflective Sensors
Classification Trouble shootings

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